Method of oblique-incidence interferogram "sewing" by three base points

Alexander G. Seregin; Il'ya P. Agurok; Galina N. Zvereva

doi:10.1117/12.195927

12 December 1994 Method of oblique-incidence interferogram "sewing" by three base points

Alexander G. Seregin, Il'ya P. Agurok, Galina N. Zvereva

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195927
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

Interferometric flatness testing of a large surface of 500 mm plus in diameter appears to be a complex problem which can be solved, in particular, by means of the oblique-incidence interferometer. The possibility of use of dumping least square method is considered in this paper. This method criteria are square sum minima both for wave front distortion function deviation and for mirror mounting errors in the three base points. The mathematical model has proved that the method proposed provides the original wave front reconstruction accuracy 2.5 ... 5 times better than by means of the former method depending on points number on a subaperture.

Citation Download Citation

Alexander G. Seregin, Il'ya P. Agurok, and Galina N. Zvereva "Method of oblique-incidence interferogram "sewing" by three base points", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195927

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