1H NMR studies of PETEOS  SiO2

Yihua He; Guang Yang; Huanzhang Fan; Chun Fang Xu; Xuewen Wu

doi:10.1117/12.190800

26 October 1994 1H NMR studies of PETEOS SiO2

Yihua He, Guang Yang, Huanzhang Fan, Chun Fang Xu, Xuewen Wu

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190800
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

¹H NMR spectra were obtained for the Plasma-Enhanced Tetraethylorthosilicate (PETEOS) SiO₂ film. The ¹H spectra consisted of two components with different linewidths, being separated into a narrow Lorentzian and a broad Gaussian. The linewidths narrowed with increasing temperature.

Citation Download Citation

Yihua He, Guang Yang, Huanzhang Fan, Chun Fang Xu, and Xuewen Wu "1H NMR studies of PETEOS SiO2", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190800

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