Two-dimensional silicon micromachined optical scanner integrated with a photodetector

Masaaki Ikeda; Hiroshi Goto; Minoru Sakata; Shyuichi Wakabayashi; Koichi Imanaka; Masashi Takeuchi; Tsuneji Yada

doi:10.1117/12.209013

12 May 1995 Two-dimensional silicon micromachined optical scanner integrated with a photodetector

Masaaki Ikeda, Hiroshi Goto, Minoru Sakata, Shyuichi Wakabayashi, Koichi Imanaka, Masashi Takeuchi, Tsuneji Yada

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209013
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

A highly miniaturized optical scanner integrated with a photo detector has been developed for miniaturization of scanning type of optical sensors. The scanner is fabricated by silicon micromachining technologies and is driven by a piezoelectric actuator. It is capable of two dimensional scanning and photo detection. The scanning angle is over 40 deg X 30 deg and the photo detecting sensitivity is 0.49 A/W for 680 nm wavelength light.

Citation Download Citation

Masaaki Ikeda, Hiroshi Goto, Minoru Sakata, Shyuichi Wakabayashi, Koichi Imanaka, Masashi Takeuchi, and Tsuneji Yada "Two-dimensional silicon micromachined optical scanner integrated with a photodetector", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209013

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