Quantitative surface evaluation using a synchronous Nomarski microscope

Xinkang Tian; Masahide Itoh; Toyohiko Yatagai

doi:10.1117/12.215589

2 August 1995 Quantitative surface evaluation using a synchronous Nomarski microscope

Xinkang Tian, Masahide Itoh, Toyohiko Yatagai

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215589
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

A simple zonal approach is proposed for estimating phase distribution on large grids. The estimation is based on phase differences that are precisely measured in two orthogonal directions by a lateral shearing interferometer. It requires only O(N²) operations for reconstructing a phase distribution on a N by N grid. Computer simulation and experimental results are demonstrated to show effectiveness of the new algorithm.

Citation Download Citation

Xinkang Tian, Masahide Itoh, and Toyohiko Yatagai "Quantitative surface evaluation using a synchronous Nomarski microscope", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215589

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