Paper
10 January 1996 UV-light-imprinted sol-gel silica glass waveguide 1x8 beam splitter on silicon
Paul Coudray, J. E. Chisham, Alireza Malek-Tabrizi, C.-Y. Li, Mark P. Andrews, S. Iraj Najafi
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Abstract
We describe fabrication and characterization of UV-light imprinted sol-gel silica glass waveguide 1 X 8 beam splitter on silicon. Waveguide fabrication parameters carried out for channel waveguide realization were adapted at this new design. The splitter exhibited a relatively uniform output and a configuration loss of 0.83 dB at 1.55 micrometers wavelength.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Coudray, J. E. Chisham, Alireza Malek-Tabrizi, C.-Y. Li, Mark P. Andrews, and S. Iraj Najafi "UV-light-imprinted sol-gel silica glass waveguide 1x8 beam splitter on silicon", Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); https://doi.org/10.1117/12.229933
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CITATIONS
Cited by 8 scholarly publications and 1 patent.
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KEYWORDS
Sol-gels

Waveguides

Glasses

Beam splitters

Silica

Silicon

Photomasks

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