Demonstration of a vapor-density monitoring system using UV radiation generated from waveguide quasi-phase-matched SHG waveguide devices

Shirley A. Galanti; Leon Val Berzins; J. B. Brown; Robert S. Tamosaitis; Michael L. Bortz; Timothy Day; Martin M. Fejer; Weizhi Wang

doi:10.1117/12.239665

10 May 1996 Demonstration of a vapor-density monitoring system using UV radiation generated from waveguide quasi-phase-matched SHG waveguide devices

Shirley A. Galanti, Leon Val Berzins, J. B. Brown, Robert S. Tamosaitis, Michael L. Bortz, Timothy Day, Martin M. Fejer, Weizhi Wang

Author Affiliations +

Proceedings Volume 2700, Nonlinear Frequency Generation and Conversion; (1996) https://doi.org/10.1117/12.239665
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Many industrial application require non-intrusive diagnostics for process monitoring and control. One example is the physical vapor deposition of titanium alloys. In this paper we present a system based on laser absorption spectroscopy for monitoring titanium vapor. Appropriate transitions for monitoring high rate vaporization of titanium require extension of available IR diode technology to the UV. The heart of this vapor density monitoring system is the 390 nm radiation generated from quasi-phase matched interactions within periodically poled waveguides. In this paper, key system components of a UV laser absorption spectroscopy based system specific for titanium density monitoring are described. Analysis is presented showing the minimum power levels necessary from the ultraviolet laser source. Performance data for prototype systems using second harmonic generation waveguide technology is presented. Application of this technology to other alloy density monitoring systems is discussed.

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Shirley A. Galanti, Leon Val Berzins, J. B. Brown, Robert S. Tamosaitis, Michael L. Bortz, Timothy Day, Martin M. Fejer, and Weizhi Wang "Demonstration of a vapor-density monitoring system using UV radiation generated from waveguide quasi-phase-matched SHG waveguide devices", Proc. SPIE 2700, Nonlinear Frequency Generation and Conversion, (10 May 1996); https://doi.org/10.1117/12.239665

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