Stepper exposure system for the quarter-micrometer age

Hirohiko Shinonaga; Mikio Arakawa

doi:10.1117/12.240937

7 June 1996 Stepper exposure system for the quarter-micrometer age

Hirohiko Shinonaga, Mikio Arakawa

Proceedings Volume 2726, Optical Microlithography IX; (1996) https://doi.org/10.1117/12.240937
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

We at Canon are ready to offer three types of steppers as a solution of 0.25micrometers age photolithography. The feature summary of the respective steppers are shown. These three steppers share the same body structure and software platform for perfect mix and match usage. The combination of these three systems should allow the chip manufacturers to achieve the most cost effective 0.25 micrometers ULSI mass production. This paper focuses on the following two points: (1) the outcome of the performance on the new KrF laser based exposure system (FPA-3000EX3); (2) overlay experimental results (mix and match with FPA-3000i4 and FPA- 3000iW). The FPA-3000 EX3 is a newly introduced KrF laser based stepper for 0.25micrometers resolution, having a high numerical aperture and wide image field. The basic printing performance of the system, such as DOF and CD LINEARITY are explained in this paper. The cost effective production, with the mix and match of the lithographic tools, is becoming more important in the 0.25micrometers age. The performance of the high throughput stepper, FPA-3000iW is discussed from the viewpoint of mix and match with critical layer steppers.

Citation Download Citation

Hirohiko Shinonaga and Mikio Arakawa "Stepper exposure system for the quarter-micrometer age", Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996); https://doi.org/10.1117/12.240937

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available