New type of common-path heterodyne profilometer

Jinjin Li; Yang Zhao; Dacheng Li

doi:10.1117/12.245176

19 July 1996 New type of common-path heterodyne profilometer

Jinjin Li, Yang Zhao, Dacheng Li

Proceedings Volume 2861, Laser Interferometry VIII: Applications; (1996) https://doi.org/10.1117/12.245176
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A new type of non-contact heterodyne profilometer with annular lens is described in this paper. The surface can be measured without the separated reference surface. The theoretical lateral resolution of this system becomes much higher of 1 m. The optical structure is easy to set up.

Citation Download Citation

Jinjin Li, Yang Zhao, and Dacheng Li "New type of common-path heterodyne profilometer", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); https://doi.org/10.1117/12.245176

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available