New principle formula of optical triangulation displacement measurement based on light scattering from rough surface

Shao-Qing Wang; Bao Hua Zhuang; Wenwei Zhang

doi:10.1117/12.263331

20 January 1997 New principle formula of optical triangulation displacement measurement based on light scattering from rough surface

Shao-Qing Wang, Bao Hua Zhuang, Wenwei Zhang

Author Affiliations +

Proceedings Volume 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II; (1997) https://doi.org/10.1117/12.263331
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

A new principle formula of optical triangulation displacement measurement has been built by the use of the theory of light scattering from object surface. The new formula has been compared with the existing formula based on the geometric optics. The main factors affecting the precision of displacement measurement has been analyzed with the new formula. The preliminary experiment results about the new formula have been reported. Some methods which can be used to reduce and correct the measurement error have been advanced.

Citation Download Citation

Shao-Qing Wang, Bao Hua Zhuang, and Wenwei Zhang "New principle formula of optical triangulation displacement measurement based on light scattering from rough surface", Proc. SPIE 2909, Three-Dimensional Imaging and Laser-Based Systems for Metrology and Inspection II, (20 January 1997); https://doi.org/10.1117/12.263331

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