Large-area surface-discharge UV light source for materials processing applications

Robert C. Sze

doi:10.1117/12.271553

4 April 1997 Large-area surface-discharge UV light source for materials processing applications

Robert C. Sze

Proceedings Volume 2987, Gas and Chemical Lasers and Applications II; (1997) https://doi.org/10.1117/12.271553
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Performance of a 6 inch by 6 inch surface discharge that give integrated light intensities greater than 400 mJ/cm² is reported here. Light uniformity on the surface of high density alumina dielectric has been measured to show better than 5% across the entire discharge area. Detailed spectroscopic content of these discharges in different gases and gas mixtures are presented from 160 nm to 735 nm region.

Citation Download Citation

Robert C. Sze "Large-area surface-discharge UV light source for materials processing applications", Proc. SPIE 2987, Gas and Chemical Lasers and Applications II, (4 April 1997); https://doi.org/10.1117/12.271553

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