5-nm resolution in a vibrating environment with a 1-mm dynamic range

Yifang Wu; C. K. Man; Bing Yin; Michael K. Giles; Thomas M. Shay

doi:10.1117/12.270027

27 March 1997 5-nm resolution in a vibrating environment with a 1-mm dynamic range

Yifang Wu, C. K. Man, Bing Yin, Michael K. Giles, Thomas M. Shay

Proceedings Volume 2993, Lasers as Tools for Manufacturing II; (1997) https://doi.org/10.1117/12.270027
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We report the first demonstration of high resolution mm dynamic range measurements using sinusoidal phase modulation interferometry. Our novel method has increased the range by over 3 orders of magnitude, while maintaining ultra-high accuracy. Simple commercial laser diodes were used and a new algorithm allowed for the first ultra-high accuracy and high dynamic range in real time for a slightly vibrating environment.

Citation Download Citation

Yifang Wu, C. K. Man, Bing Yin, Michael K. Giles, and Thomas M. Shay "5-nm resolution in a vibrating environment with a 1-mm dynamic range", Proc. SPIE 2993, Lasers as Tools for Manufacturing II, (27 March 1997); https://doi.org/10.1117/12.270027

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