Novel sol-gel fabrication of integrated optical waveguides

M. Amir Fardad; Mark P. Andrews; S. Iraj Najafi

doi:10.1117/12.264134

23 January 1997 Novel sol-gel fabrication of integrated optical waveguides

M. Amir Fardad, Mark P. Andrews, S. Iraj Najafi

Proceedings Volume 2997, Integrated Optics Devices: Potential for Commercialization; (1997) https://doi.org/10.1117/12.264134
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The sol-gel method is employed to implement a new, simple and highly versatile fabrication process for integrated optical waveguides on silicon. Photosensitive glass films of several microns thickness are dip-coated and optical components of various configurations through suitable masks are directly inscribed in them by ultraviolet light. Undefined regions are removed by soaking the films in an organic solvent for a few minutes. The developed ridges are then treated and planarized with a cladding layer. Altogether, the procedure is reproducible, and leads to waveguides with low propagation losses, on the order of 0.13 dB/cm.

Citation Download Citation

M. Amir Fardad, Mark P. Andrews, and S. Iraj Najafi "Novel sol-gel fabrication of integrated optical waveguides", Proc. SPIE 2997, Integrated Optics Devices: Potential for Commercialization, (23 January 1997); https://doi.org/10.1117/12.264134

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