Determination of sodium and potassium in aqueous developers by flame emission spectroscopy

Robert F. Almeida

doi:10.1117/12.275901

7 July 1997 Determination of sodium and potassium in aqueous developers by flame emission spectroscopy

Robert F. Almeida

Proceedings Volume 3049, Advances in Resist Technology and Processing XIV; (1997) https://doi.org/10.1117/12.275901
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

As specifications for trace metals are lowered in semiconductor chemicals, analysis time and the potential for contamination have increased. Two important metals: Na and K, are typically analyzed by graphite furnace AAS (GFAA). GFAA is capable of analyzing aqueous developers with very low detection limits, but GFAA is not the perfect procedure due to its long run time and the potential for contamination. The semiconductor industry needs a procedure to analyze Na and K at low levels quickly and with less of a chance for contamination. At OMM we have developed procedures using flame emission spectroscopy (FES) to analyze our aqueous developers for Na and K. Our Buck sodium analyzer is able to analyze aqueous developers substantially faster than GFAA with less chance of condemnation. We have improved on the Buck procedure using the TJA AA SCAN 1 FES which is able to analy Na and K in quick succession giving the appearance of simultaneous analysis, further speeding up the analysis. At OMM we have applied FES for the analysis of aqueous developers for very low detection limits and extremely shorter analysis times. In spite of the shortened analysis times our detection limits for developers is 200 ppt.

Citation Download Citation

Robert F. Almeida "Determination of sodium and potassium in aqueous developers by flame emission spectroscopy", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); https://doi.org/10.1117/12.275901

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