Surface inspection of transparent materials with a compact reflection sensor

Mathias Koscheck; Wolfram Kleuver; Juergen Weber; Klaus Hartmann

doi:10.1117/12.287763

25 September 1997 Surface inspection of transparent materials with a compact reflection sensor

Mathias Koscheck, Wolfram Kleuver, Juergen Weber, Klaus Hartmann

Proceedings Volume 3100, Sensors, Sensor Systems, and Sensor Data Processing; (1997) https://doi.org/10.1117/12.287763
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Introduction of a compact sensor system to detect abnormalities on high graded, polished surfaces in production process. Usable for TQM in line of coating quality of lenses, glass plates, wafers or other high quality products. Optimized for non destructive, high speed scanning (2.5 m/s) of transparent materials with a low reflection rate and a resolution down to some micrometers 's. Reachable even in a noisy industrial environment. Available in a 19' rack with profibus data-link.

Citation Download Citation

Mathias Koscheck, Wolfram Kleuver, Juergen Weber, and Klaus Hartmann "Surface inspection of transparent materials with a compact reflection sensor", Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); https://doi.org/10.1117/12.287763

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