Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray

Xueqian Li; Xiaowei Song; Yi Qu; Mei Li; Xingde Zhang

doi:10.1117/12.300731

20 February 1998 Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray

Xueqian Li, Xiaowei Song, Yi Qu, Mei Li, Xingde Zhang

Author Affiliations +

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300731
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

The measuring conditions of the thickness of thin films with grazing incident x-ray is explained, and interferential principle and method to measure the thickness of thin films by grazing incident x-ray are discussed and analyzed in the paper. The periodic thickness of the multilayer optical thin films is measured with double-crystal diffractometer at a very small grazing incident angle, the result is satisfactory and measured values is in good agreement with designed values.

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Xueqian Li, Xiaowei Song, Yi Qu, Mei Li, and Xingde Zhang "Analysis of the thickness measurement of multilayer optical thin films with grazing incident x-ray", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300731

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