Technology of ultrathin films for ion-preventive feedback

Delong Jiang; Jingquan Tian; Guo-Jun Liu; Yaohua Lu; Ye Li; Lichen Fu; Guifen Wang

doi:10.1117/12.300701

20 February 1998 Technology of ultrathin films for ion-preventive feedback

Delong Jiang, Jingquan Tian, Guo-Jun Liu, Yaohua Lu, Ye Li, Lichen Fu, Guifen Wang

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300701
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

This paper introduces the materials and structure as well as the forming method of ultrathin films for ion-preventative feedback. The characteristics and measuring results are given. In the meantime, preliminary analysis and discussion are carried out.

Citation Download Citation

Delong Jiang, Jingquan Tian, Guo-Jun Liu, Yaohua Lu, Ye Li, Lichen Fu, and Guifen Wang "Technology of ultrathin films for ion-preventive feedback", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300701

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