3D computer vision for microassembly stations and microfabrication

Armin Sulzmann; Jacques Jacot

doi:10.1117/12.298044

1 January 1998 3D computer vision for microassembly stations and microfabrication

Armin Sulzmann, Jacques Jacot

Proceedings Volume 3202, Microrobotics and Microsystem Fabrication; (1998) https://doi.org/10.1117/12.298044
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States

Abstract

In this article we describe the use of 3D computer vision for microassembly stations and future microfabrication. 3D measurements are performed using a newly developed high precision 3D computer vision system to characterize the spacial positions of the microrobots or microgrippers in action. To describe relative motion of the microrobots or microactuators, the natural texture of the micropart is used to compute 3D displacement. The microscope image CCD receives high frequency changes in light intensity from the surface of the gripper in focus. Using depth of focus, high resolution camera calibration, passive auto focus algorithms and 2D object recognition, the position and the displacement of the microrobot can be characterized in the 3D workspace and can be guided in micro-assembly tasks. Newly developed microgripper with integrated tracking structures will be presented to illustrate and explain the approach. Several other examples like chip manipulation and micromotor assembly will be presented and discussed.

Citation Download Citation

Armin Sulzmann and Jacques Jacot "3D computer vision for microassembly stations and microfabrication", Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); https://doi.org/10.1117/12.298044

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