Methodology for optimizing transistor performance

Whitson G. Waldo

doi:10.1117/12.284610

27 August 1997 Methodology for optimizing transistor performance

Whitson G. Waldo

Proceedings Volume 3212, Microelectronic Device Technology; (1997) https://doi.org/10.1117/12.284610
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

A methodology is presented for optimizing transistor performance by considering the coupled response of the on- state and off-state parameters of saturated drain current and subthreshold drain leakage current, respectively. Good die yield in a CMOS digital logic integrated circuit is shown to be highly correlated to a multiple linear model of these transistor performance parameters using empirical data. These currents are correspondingly highly correlated to threshold voltage and effective channel length. Monte Carlo simulation is used to predict the distributions of saturated drain current and subthreshold drain current based on the natural variation of threshold voltage and effective channel length. A case study is presented using this methodology for the development of a CMOS retrograde well process using high energy implants from a baseline process using conventional diffused wells.

Citation Download Citation

Whitson G. Waldo "Methodology for optimizing transistor performance", Proc. SPIE 3212, Microelectronic Device Technology, (27 August 1997); https://doi.org/10.1117/12.284610

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available