Resonator using polarization beamsplitter prism for microlithography KrF excimer laser

Keiichiro Yamanaka; Yuji Hashidate; Hidemi Takahashi; Nobuaki Furuya

doi:10.1117/12.308119

13 May 1998 Resonator using polarization beamsplitter prism for microlithography KrF excimer laser

Keiichiro Yamanaka, Yuji Hashidate, Hidemi Takahashi, Nobuaki Furuya

Proceedings Volume 3267, Laser Resonators; (1998) https://doi.org/10.1117/12.308119
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

We discuss a new resonator design for sub-pm bandwidth (FWHM) KrF excimer laser using an etalon, a grating and prisms. This resonator uses a polarization beam splitter prism (PBSP) which has both functions of splitting polarized beam and beam expansion to reduce the resonator length. In our experiments, the output power is improved 29.4% by using PBSP in comparison with the conventional method, while the bandwidth (FWHM) is reduced from less than 0.9 pm to less than 0.6 pm at the same time. A calculation has been done to confirm the output power dependence on the resonator length and the loss of optics. Its result explains our experimental results approximately. We demonstrated that PBSP has a significant effect to improve the output power of the narrow bandwidth KrF excimer laser that would result in the extension of chamber lifetime. Furthermore, this technique will help the development of the band narrowing excimer laser for microlithography.

Citation Download Citation

Keiichiro Yamanaka, Yuji Hashidate, Hidemi Takahashi, and Nobuaki Furuya "Resonator using polarization beamsplitter prism for microlithography KrF excimer laser", Proc. SPIE 3267, Laser Resonators, (13 May 1998); https://doi.org/10.1117/12.308119

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available