Measurement on roughness of optical surface by focal plane CCD camera

Jianbai Li; Xiaoyun Li; Aihan Ying; Anqing Zao; Xiaolin Zhang

doi:10.1117/12.304393

1 April 1998 Measurement on roughness of optical surface by focal plane CCD camera

Jianbai Li, Xiaoyun Li, Aihan Ying, Anqing Zao, Xiaolin Zhang

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304393
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

In this paper, the new method on evaluating and measuring roughness of optical surface by CCD camera is presented. The microstructure of surface of samples studied is revealed by a replication technique. The electron photomicrographs of one surface replication of each sample is obtained at two magnification. We note that a grained structure is presented due to residual rough grooves from polishing process. The electron photomicrographs of optical surface is scanned and analyzed by CCD camera-microcomputer system. The corresponding surface profiles are displayed at CRT of microcomputer system, with X-axis corresponding the micrograph spatial coordinate and Y-axis corresponding the micrograph density (i.e. roughness of the real surface). The above-mentioned method has both good vertical and lateral resolution (0.1 - 1.0 nm) due to using CCD camera scanner, but a poor lateral one (100 - 1000 nm) by classical interferometer method. The new method has availability for evaluating and testing optical and supersmooth surface.

Citation Download Citation

Jianbai Li, Xiaoyun Li, Aihan Ying, Anqing Zao, and Xiaolin Zhang "Measurement on roughness of optical surface by focal plane CCD camera", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304393

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