New Deep Ultraviolet Source For Microlithography

Michael G. Ury; John C. Matthews; Charles H. Wood

doi:10.1117/12.933582

13 September 1982 New Deep Ultraviolet Source For Microlithography

Michael G. Ury, John C. Matthews, Charles H. Wood

Proceedings Volume 0334, Optical Microlithography I: Technology for the Mid-1980s; (1982) https://doi.org/10.1117/12.933582
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

An electrodeless microwave powered deep UV source has been developed. This source pro-duces a unique intense spectrum between 190 and 260nm. Deep UV radiated power output efficiencies exceed 10% at microwave power input levels of 1500 watts. The lack of elec-trodes avoids output attenuation due to electrode sputtering that can cause deep UV fall-off and early bulb failure with compact arcs. Optical systems have been designed to utilize this source for effective flood irradiation of wafers with deep UV having good intensity, uniformity and collimation characteristics. One application of this source is to the portable conformable mask (PCM) technique for meeting submicrometer resolution requirements over profiled surfaces. In this application the exposure time to clear a 2 micrometer PMMA layer using the microwave powered deep UV source is less than 30 seconds.

Citation Download Citation

Michael G. Ury, John C. Matthews, and Charles H. Wood "New Deep Ultraviolet Source For Microlithography", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); https://doi.org/10.1117/12.933582

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available