650-nm GaInP/AlGaInP visible laser diode with buried tapered-ridge structure

Jun-Ho Jang; Young-Hak Chang; Hee-Suk Song; Dong-Hwan Kim; Jong-Seok Kim; Tae-Kyung Yoo

doi:10.1117/12.310999

22 June 1998 650-nm GaInP/AlGaInP visible laser diode with buried tapered-ridge structure

Jun-Ho Jang, Young-Hak Chang, Hee-Suk Song, Dong-Hwan Kim, Jong-Seok Kim, Tae-Kyung Yoo

Proceedings Volume 3419, Optoelectronic Materials and Devices; 34190H (1998) https://doi.org/10.1117/12.310999
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

A new tapered ridge waveguide structure is employed in GaInP/AlGaInP laser diodes in order to increase (theta) _{PLL for digital versatile disk optical pick-up application. The dry-etched buried tapered ridge has been fabricated using BCl(subscript 3}/Ar plasma in electron cyclotron resonance reactive ion etching system and chemical treatments. The parallel far-field angle was increased up to 9.7 degrees when the width of tapered ridge at the front facet was reduced down to 3.2 micrometers . The threshold current was 60mA and slope efficiency was 0.42W/A, which were comparable to the values of wet-etched lasers. The characteristics temperatures were estimated to be 154K at 25-60 degrees C and 60K at 60-100 degrees C. An operating time of over 1000 hours at the output power of 5mW at 70 degrees C was obtained without significant increase of operating current, which indicates a sufficient reliability for commercial purposes.

Citation Download Citation

Jun-Ho Jang, Young-Hak Chang, Hee-Suk Song, Dong-Hwan Kim, Jong-Seok Kim, and Tae-Kyung Yoo "650-nm GaInP/AlGaInP visible laser diode with buried tapered-ridge structure", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190H (22 June 1998); https://doi.org/10.1117/12.310999

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available