General sticking coefficient theory for neutral and photochemically excited molecules

Michael C. Fong

doi:10.1117/12.328496

27 October 1998 General sticking coefficient theory for neutral and photochemically excited molecules

Michael C. Fong

Proceedings Volume 3427, Optical Systems Contamination and Degradation; (1998) https://doi.org/10.1117/12.328496
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper discuses a general sticking coefficient theory for both neutral molecules and photochemically excited molecules in a solar vacuum UV (VUV) radiation environment. For neutral-molecule problems, the theory is based on the classical adsorption kinetics concept for either a single- component or multi-component gas on a surface with a constant incident flux. The theory has been verified satisfactorily with available DC-704 test data. For photochemically induced adsorption problems, a sticking coefficient model modified from that in the literature is proposed. This model asserts that photochemical reactions can take place only if the neutral-molecule residence time is longer than the photoexcitation dwell time. The total sticking coefficient is the sum of the neutral-molecule sticking coefficient and the photoexcited-molecule sticking coefficient. The photochemically induced deposition enhancement predicted by the present theory shows reasonable agreement with data presented in the literature.

Citation Download Citation

Michael C. Fong "General sticking coefficient theory for neutral and photochemically excited molecules", Proc. SPIE 3427, Optical Systems Contamination and Degradation, (27 October 1998); https://doi.org/10.1117/12.328496

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