Acoustic wavelet analysis using micro-electro-mechanical sensors

Markus Mueller; Hiroshi Toshiyoshi; Hiroyuki Fujita

doi:10.1117/12.323905

8 September 1998 Acoustic wavelet analysis using micro-electro-mechanical sensors

Markus Mueller, Hiroshi Toshiyoshi, Hiroyuki Fujita

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323905
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We have developed several types of mechanical and electro- mechanical acoustic sensors using SOI (silicon on insulator) micromachining technique. This paper describes the design, the fabrication and the characterization of three such acoustic sensors. The goal of our research is to integrate a preprocessor for a voice/speech recognition system on a silicon chip, and to create an implantable hearing aid device.

Citation Download Citation

Markus Mueller, Hiroshi Toshiyoshi, and Hiroyuki Fujita "Acoustic wavelet analysis using micro-electro-mechanical sensors", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323905

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