Optical detection of laser plasma interaction during laser ablation

Minghui Hong; Yongfeng Lu

doi:10.1117/12.352673

15 July 1999 Optical detection of laser plasma interaction during laser ablation

Minghui Hong, Yongfeng Lu

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352673
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Laser plasma interaction during pulsed laser ablation is investigated by ultrafast phototube detection. There are two peaks in an optical signal with the first peak attributed to laser scattering and the second one to plasma generation. As laser fluence increases, the second peak rises earlier to overlap with the first one. The signal is fitted by different distribution functions for the laser scattering and the plasma generation. Peak amplitude and its arrival time, full width at half maximum (FWHM), starting time and termination time of the distributions are studied for different laser fluences and detection angles. Laser pulse is mainly scattered from the plasma during the laser ablation. Peak amplitude of the laser scattering increases but its FWHM decreases with laser fluence. Angular distribution of the peak amplitude can be fitted with cosⁿ while detection angle has no obvious influence on the FWHM. In addition, FWHM and peak amplitude of the plasma increase starting and scattered laser pulse termination is proposed as a quantitative parameter to characterize laser plasma interaction. threshold fluence for the interaction can be estimated to be 3.5 J/cm² for KrF excimer ablation of silicon. For laser fluence above 12.6 J/cm², the plasma and scattered laser pulse distributions tend to saturate.

Citation Download Citation

Minghui Hong and Yongfeng Lu "Optical detection of laser plasma interaction during laser ablation", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352673

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