BeamM2AP: real-time focus, alignment, and M2 measurement of tightly focussed laser beams

Andrew D. MacGregor; Steven E. Garvey

doi:10.1117/12.343709

29 March 1999 BeamM²AP: real-time focus, alignment, and M² measurement of tightly focussed laser beams

Andrew D. MacGregor, Steven E. Garvey

Proceedings Volume 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1999) https://doi.org/10.1117/12.343709
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

This paper describes the design and performance of a compact new multi-plane scanning slit Beam Profiler. It allows simultaneous real-time measurement of M² beam quality, focus position, beam-waist diameter and axial alignment, solving problems in the active adjustment and verification of tightly focused laser beams. The DataRay BeamM²AP^TM measures preset pass/fail criteria with sub-micron accuracy at greater than 5 Hz update rate. It is suited to the development, QA and production of precision focused laser assemblies for applications such as disk/wafer characterization, laser printing, etc.

Citation Download Citation

Andrew D. MacGregor and Steven E. Garvey "BeamM²AP: real-time focus, alignment, and M² measurement of tightly focussed laser beams", Proc. SPIE 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, (29 March 1999); https://doi.org/10.1117/12.343709

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