Lithographic properties of novel acetal-derivatized hydroxy styrene polymers

Sanjay Malik; Andrew J. Blakeney; Lawrence Ferreira; Brian Maxwell; Allyn Whewell; Thomas R. Sarubbi; Murrae J. Bowden; Veerle Van Driessche; Toru Fujimori; Shiro Tan; Toshiaki Aoai; Kazuya Uenishi; Yasumasa Kawabe; Tadayoshi Kokubo

doi:10.1117/12.350222

11 June 1999 Lithographic properties of novel acetal-derivatized hydroxy styrene polymers

Sanjay Malik, Andrew J. Blakeney, Lawrence Ferreira, Brian Maxwell, Allyn Whewell, Thomas R. Sarubbi, Murrae J. Bowden, Veerle Van Driessche, Toru Fujimori, Shiro Tan, Toshiaki Aoai, Kazuya Uenishi, Yasumasa Kawabe, Tadayoshi Kokubo

Author Affiliations +

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350222
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Lithographic properties of a variety of acetal-derivatized styrene based polymers are reported. The structural modifications in the polymers involve varying the size of the pendent acetal moiety. the lithographic performances of the resists containing structurally modified acetals were found to be superior to the conventional acetals. In the cases where the acidolysis products of the modified acetals are non-volatile alcohols, the post-exposure volatilization, film shrinkage and plasma etch resistance were found to be significantly improved.

Citation Download Citation

Sanjay Malik, Andrew J. Blakeney, Lawrence Ferreira, Brian Maxwell, Allyn Whewell, Thomas R. Sarubbi, Murrae J. Bowden, Veerle Van Driessche, Toru Fujimori, Shiro Tan, Toshiaki Aoai, Kazuya Uenishi, Yasumasa Kawabe, and Tadayoshi Kokubo "Lithographic properties of novel acetal-derivatized hydroxy styrene polymers", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350222

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available