Multichannel averaging phasemeter for picometer precision laser metrology

Peter G. Halverson; Donald R. Johnson; Andreas C. Kuhnert; Stuart B. Shaklan; Robert Spero

doi:10.1117/12.347767

7 May 1999 Multichannel averaging phasemeter for picometer precision laser metrology

Peter G. Halverson, Donald R. Johnson, Andreas C. Kuhnert, Stuart B. Shaklan, Robert Spero

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347767
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

The Micro-Arcsecond Metrology (MAM) team at the Jet Propulsion Laboratory has developed a precision phasemeter for the Space Interferometry Mission (SIM). The current version of the phasemeter is well-suited for picometer accuracy distance measurements and tracks at speeds up to 50 cm/sec, when coupled to SIM's 1.3 micron wavelength heterodyne laser metrology gauges. Since the phasemeter is implemented with industry standard FPGA chips, other accuracy/speed trade-off points can be programmed for applications such as metrology for earth-based long-baseline astronomical interferometry (planet finding), and industrial applications such as translation stage and machine tool positioning. The phasemeter is a standard VME module, supports 6 metrology gauges, a 128 MHz clock, has programmable hardware averaging, and maximum range of 2³² cycles (2000 meters at 1.3 microns).

Citation Download Citation

Peter G. Halverson, Donald R. Johnson, Andreas C. Kuhnert, Stuart B. Shaklan, and Robert Spero "Multichannel averaging phasemeter for picometer precision laser metrology", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347767

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