High-speed and high-resolution heterodyne interferometer using a three-mode laser

Toshiyuki Yokoyama; Tsutomu Araki; Shuko Yokoyama; Norihito Suzuki

doi:10.1117/12.355019

19 July 1999 High-speed and high-resolution heterodyne interferometer using a three-mode laser

Toshiyuki Yokoyama, Tsutomu Araki, Shuko Yokoyama, Norihito Suzuki

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.355019
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

In the measurement using conventional heterodyne interferometer, `high-speed' and `high-resolution' were methodologically contradictory problems. Previously, authors have solved this contradiction by using two conjugate beat signals. In this work, we realized highly sensitive measurement without speed limit of the target using a three- mode laser. The synthetic wavelength of (lambda) /2 generated by three-mode laser enabled to increase the measurement sensitivity twice. The three-mode laser also has an advantage of higher output power.

Citation Download Citation

Toshiyuki Yokoyama, Tsutomu Araki, Shuko Yokoyama, and Norihito Suzuki "High-speed and high-resolution heterodyne interferometer using a three-mode laser", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.355019

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