Measurement of depth profile of hydrogen isotope atom contained in solid material using resonant laser ablation

Masafumi Yorozu; Yasuhiro Okada; Terunobu Nakajyo; Akira Endo

doi:10.1117/12.364252

21 September 1999 Measurement of depth profile of hydrogen isotope atom contained in solid material using resonant laser ablation

Masafumi Yorozu, Yasuhiro Okada, Terunobu Nakajyo, Akira Endo

Author Affiliations +

Proceedings Volume 3824, Optical Measurement Systems for Industrial Inspection; (1999) https://doi.org/10.1117/12.364252
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The depth profile of hydrogen isotope atoms was measured by using mass spectrometry combined with resonant laser ablation. A graphite sample was implanted with deuterium by a cyclotron and was employed for the measurements. The graphite sample was ablated by a tunable laser which wavelength was corresponding to the resonant wavelength of 1S - 2S for deuterium with two- photon excitation. The ablated deuterium was ionized by a 2 + 1 resonant ionization process. The ions were analyzed by a time of flight (TOF) mass spectrometer. The deuterium ions were detected very clearly with resonant ablation contrast to non-resonant measurement. The depth profile was determined from the intensity of the mass spectrum and the etching depth. The depth profile was compared to the simulated profiles. Each profile coincided within the error of the numerical simulation.

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Masafumi Yorozu, Yasuhiro Okada, Terunobu Nakajyo, and Akira Endo "Measurement of depth profile of hydrogen isotope atom contained in solid material using resonant laser ablation", Proc. SPIE 3824, Optical Measurement Systems for Industrial Inspection, (21 September 1999); https://doi.org/10.1117/12.364252

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