Planar optical system design and fabrication

Zhisheng Yun; Yee Loy Lam; Yuen Chuen Chan; Yan Zhou; Liping Zhao; ChinYi Liaw

doi:10.1117/12.360520

31 August 1999 Planar optical system design and fabrication

Zhisheng Yun, Yee Loy Lam, Yuen Chuen Chan, Yan Zhou, Liping Zhao, ChinYi Liaw

Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360520
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

The study of planar imaging system is an interesting topic because its compact structure and lightweight are consistent with the trend of production miniaturization. This paper presents our study of designing and fabricating planar imaging elements. Theoretical analysis of grating and off- axis imaging diffractive elements was conducted. A low- aberration symmetrical imaging optical system was designed and evaluated with CODE V. Using a variable intensity laser- writing system, diffractive surface relief patterns were written on photoresist and were later transferred to a fused quartz plate.

Citation Download Citation

Zhisheng Yun, Yee Loy Lam, Yuen Chuen Chan, Yan Zhou, Liping Zhao, and ChinYi Liaw "Planar optical system design and fabrication", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); https://doi.org/10.1117/12.360520

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