Neural network modeling of growth processes

S. Venkateswaran; M. M. Rai; T. R. Govindan; Meyya Meyyappan

doi:10.1117/12.391447

14 July 2000 Neural network modeling of growth processes

S. Venkateswaran, M. M. Rai, T. R. Govindan, Meyya Meyyappan

Proceedings Volume 3944, Physics and Simulation of Optoelectronic Devices VIII; (2000) https://doi.org/10.1117/12.391447
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

Process control based on first-principles models is possible if the information from the reactor simulations can be represented in a compact model. This is necessary since on- demand reactor simulation in real time for control purposes is not currently realistic. We have developed a neural network based model for applications in process control and process design.

Citation Download Citation

S. Venkateswaran, M. M. Rai, T. R. Govindan, and Meyya Meyyappan "Neural network modeling of growth processes", Proc. SPIE 3944, Physics and Simulation of Optoelectronic Devices VIII, (14 July 2000); https://doi.org/10.1117/12.391447

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