Manufacturing considerations for implementation of scatterometry for process monitoring

John A. Allgair; David C. Benoit; Robert R. Hershey; Lloyd C. Litt; Ibrahim S. Abdulhalim; William Braymer; Michael Faeyrman; John Charles Robinson; Umar K. Whitney; Yiping Xu; Piotr Zalicki; Joel L. Seligson

doi:10.1117/12.386465

2 June 2000 Manufacturing considerations for implementation of scatterometry for process monitoring

John A. Allgair, David C. Benoit, Robert R. Hershey, Lloyd C. Litt, Ibrahim S. Abdulhalim, William Braymer, Michael Faeyrman, John Charles Robinson, Umar K. Whitney, Yiping Xu, Piotr Zalicki, Joel L. Seligson

Author Affiliations +

Proceedings Volume 3998, Metrology, Inspection, and Process Control for Microlithography XIV; (2000) https://doi.org/10.1117/12.386465
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The continuing demand for higher frequency microprocessors and larger memory arrays has led to decreasing device dimensions and smaller process control windows. Decreasing process control windows have created a need for higher precision metrology to maintain an acceptable precision to tolerance ratio with a reasonable sampling rate. In order to determine and reduce across chip, across wafer, and across lot linewidth variations, higher sampling is required which, in turn, demands faster move acquire measure (MAM) times to maintain throughput. Finally, the need to detect and quantify sidewall angle changes in addition to CD measurements is becoming critical. Spectroscopic Scatterometry is a metrology technique which offers the potential to meet these requirements. This work explores some of the fundamental technology concerns for implementing scatterometry in a manufacturing environment. These concerns include mark requirements and characterization necessary for library generation. Comparison of scatterometry data to in-line CD SEM, x-section SEM, and AFM results will be presented.

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John A. Allgair, David C. Benoit, Robert R. Hershey, Lloyd C. Litt, Ibrahim S. Abdulhalim, William Braymer, Michael Faeyrman, John Charles Robinson, Umar K. Whitney, Yiping Xu, Piotr Zalicki, and Joel L. Seligson "Manufacturing considerations for implementation of scatterometry for process monitoring", Proc. SPIE 3998, Metrology, Inspection, and Process Control for Microlithography XIV, (2 June 2000); https://doi.org/10.1117/12.386465

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