Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask

Aurelian Marcu; Constantin Grigoriu; W. Jang; Kiyoshi Yatsui

doi:10.1117/12.378728

23 February 2000 Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask

Aurelian Marcu, Constantin Grigoriu, W. Jang, Kiyoshi Yatsui

Proceedings Volume 4068, SIOEL '99: Sixth Symposium on Optoelectronics; (2000) https://doi.org/10.1117/12.378728
Event: SIOEL: Sixth Symposium of Optoelectronics, 1999, Bucharest, Romania

Abstract

The laser ablation is one of the best ways to obtain smooth thin film deposited on various substrates. However, to obtain a 'droplets-free' surface some special experimental setups are necessary.ONe of them is the 'eclipse' method, using a plane shadow mask. Based on studies on the plume behavior in a 'standard' deposition and in a plane shadow mask eclipse deposition, we prose a new shadow mask having a an helicoidal shape, which permit to obtain a abetter film quality - maximum droplets size about 10 times smaller than for the plane shadow mask. The plume behavior and thin film quality are presented and discussed.

Citation Download Citation

Aurelian Marcu, Constantin Grigoriu, W. Jang, and Kiyoshi Yatsui "Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask", Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); https://doi.org/10.1117/12.378728

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