Fabrication and packaging of optical components and microsystems

Juha T. Rantala; Janne K. Aikio; Pentti Karioja; Michael R. Descour; Harri K. Kopola; Jorma Lammasniemi

doi:10.1117/12.397926

1 September 2000 Fabrication and packaging of optical components and microsystems

Juha T. Rantala, Janne K. Aikio, Pentti Karioja, Michael R. Descour, Harri K. Kopola, Jorma Lammasniemi

Proceedings Volume 4075, Micro-Opto-Electro-Mechanical Systems; (2000) https://doi.org/10.1117/12.397926
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

The paper reports on methods to fabricate novel materials and associated processing for optoelectronics and optical structures compatible with manufacturing of microsystems. Furthermore, the paper presents results on designing, fabrication and packaging of different modules and microsystems for sensor, instrumentation and optical communication applications. New materials are developed and liquid phase deposition methods are applied for the fabrication of lithography compatible glasses, conducive transparent glasses and protective materials. The developed lithographic glasses are used for example to fabricate micro-opto-mechanical structures. By using these materials and structures, a miniaturized micro-optical table is constructed. Furthermore, organic and hybrid semiconductors and light emitting materials are manufactured and their integration as micro-optical components and systems are described. From the view-point of module integration, a wavelength tunable laser diode, i.e., a MOEMS consisting of laser diode and a silicon micromachined Fabry-Perot interferometer, is demonstrated and modeled. A ~4nm wavelength tuning range with ~0.3nm FWHM spectral width is experimentally obtained at 980 nm. Moreover, the use of a passive alignment structure for the fiber pigtailing of a multimode laser diode is demonstrated. The ceramic alignment structure is hot embossed with a LIGA machined tool and results in a ~56% coupling efficiency, corresponding to the theoretical maximum.

Citation Download Citation

Juha T. Rantala, Janne K. Aikio, Pentti Karioja, Michael R. Descour, Harri K. Kopola, and Jorma Lammasniemi "Fabrication and packaging of optical components and microsystems", Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); https://doi.org/10.1117/12.397926

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available