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26 October 2000 MEMS technology at NASA's Jet Propulsion Laboratory
Thomas George, Sam Young Bae, Indrani Chakraborty, Hillary Cherry, Christopher Evans, Beverley Eyre, Amanda A. Green, Allan Hui, Kevin King, H. Lynn Kim, Russell A. Lawton, Gisela Lin, Colleen Marrese, Juergen Mueller, Judith A. Podosek, Kirill Shcheglov, Tony K. Tang, Thomas R. VanZandt, Stephen E. Vargo, Joanne Wellman, Victor White, Dean V. Wiberg, Eui-Hyeok Yang
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Proceedings Volume 4134, Photonics for Space Environments VII; (2000) https://doi.org/10.1117/12.405340
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States
Abstract
The MEMS Technology Group is part of the Microdevices Laboratory (MDL) at the Jet Propulsion Laboratory (JPL). The group pursues the development of a wide range of advanced MEMS technologies that are primarily applicable to NASA's robotic as well as manned exploration missions. Thus these technologies are ideally suited for the demanding requirements of space missions namely, low mass, low power consumption and high reliability, without significant loss of capability. End-to-end development of these technologies is conducted at the MDL, a 38,000 sq. ft. facility with approximately 5500 sq. ft. each of cleanroom (class 10 - 100,000) and characterization laboratory space. MDL facilities include computer design and simulation tools, optical and electron-beam lithography, thin film deposition equipment, dry and wet etching facilities including Deep Reactive Ion Etching, device assembly and testing facilities. Following the fabrication of the device prototypes, reliability testing of these devices is conducted at the state-of-the-art Failure Analysis Laboratory at JPL.
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Thomas George, Sam Young Bae, Indrani Chakraborty, Hillary Cherry, Christopher Evans, Beverley Eyre, Amanda A. Green, Allan Hui, Kevin King, H. Lynn Kim, Russell A. Lawton, Gisela Lin, Colleen Marrese, Juergen Mueller, Judith A. Podosek, Kirill Shcheglov, Tony K. Tang, Thomas R. VanZandt, Stephen E. Vargo, Joanne Wellman, Victor White, Dean V. Wiberg, and Eui-Hyeok Yang "MEMS technology at NASA's Jet Propulsion Laboratory", Proc. SPIE 4134, Photonics for Space Environments VII, (26 October 2000); https://doi.org/10.1117/12.405340
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KEYWORDS
Microelectromechanical systems
Reliability
Sensors
Liquids
Scanning electron microscopy
Spectroscopy
Magnetic sensors
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