Producing LIGA-competitive microcomponents

Wayne Nguyen Phu Hung; Mohammad Yeakub Ali; Shu Yuan

doi:10.1117/12.396444

25 August 2000 Producing LIGA-competitive microcomponents

Wayne Nguyen Phu Hung, Mohammad Yeakub Ali, Shu Yuan

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396444
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

This paper presents a new technique to investigate deep microfeatures, and an alternative process to produce micro components. Micro-EDM and focused ion beam micromachining were combined to directly fabricate the mold features. The first process was to remove the bulk material while the later was to produce intricate details and improve the surface integrity. To investigate the effects of ion beam parameters on the mold material, nickel beryllium blocks were first ground, polished then mechanically clamped together. A focused ion beam using Ga⁺ ions was used to produce deep microfeatures at the block interfaces, after which the blocks were separated and the in-situ cross sections were examined. The parameters used were varied in the ranges of 30-50 kV accelerating voltage, 2-150 nC/micrometers ² dose, and 5-7000 pA beam current by either dry sputtering or gas-assisted etching. LIGA-competitive features were achieved. Selection of Ni-Be was made sine its mechanical properties were superior to those of pure nickel used in the LIGA process. This ensured a longer mold life when one repeatedly injecting a hot/abrasive polymer to the mold cavity to fabricate 3D micro components in production. Feature obtained with Ni-Be had surface finish approximately 10 nm, accuracy < micrometers , and aspect ratio > 10. Preliminary work showed the success of this technique with micro molded plastics components.

Citation Download Citation

Wayne Nguyen Phu Hung, Mohammad Yeakub Ali, and Shu Yuan "Producing LIGA-competitive microcomponents", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396444

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available