Spiral wound transducer

Paul C. Elliott; Stephen M. Bobbio; Michael A. Pennington; Stephen W. Smith; Jason M. Zara; John A. Hudak; Jennifer Pagan; Buchanan J. Rouse

doi:10.1117/12.395621

15 August 2000 Spiral wound transducer

Paul C. Elliott, Stephen M. Bobbio, Michael A. Pennington, Stephen W. Smith, Jason M. Zara, John A. Hudak, Jennifer Pagan, Buchanan J. Rouse

Author Affiliations +

Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395621
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The Spiral Wound Transducer (SWT) is a muscle-like actuator comprising an array of deformable capacitors. The SWT is fabricated as a flat multilayer metallized plastic structure on a silicon wafer. Conventional microelectronic manufacturing techniques are used and will be described. The novel aspect of fabrication occurs after the flat SWT structures (tapes) are lifted off the wafer. In order to form a volumetric three- dimensional actuator the tapes are wound up upon themselves and bounded using a laminating process. This work as well as a characterization of the performance of the SWTs will be presented.

Citation Download Citation

Paul C. Elliott, Stephen M. Bobbio, Michael A. Pennington, Stephen W. Smith, Jason M. Zara, John A. Hudak, Jennifer Pagan, and Buchanan J. Rouse "Spiral wound transducer", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); https://doi.org/10.1117/12.395621

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available