Latching-type 2x2 and 1x4 fiber-optic switches

Peter Kopka; Martin Hoffmann; Edgar I. Voges

doi:10.1117/12.396488

22 August 2000 Latching-type 2x2 and 1x4 fiber-optic switches

Peter Kopka, Martin Hoffmann, Edgar I. Voges

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396488
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The presented latching-type 2 by 2 and 1 by 4 fiber-optic switches are based on full wafer micromachining of silicon wafers using anisotropic wet etching in KOH. Bulk micromachining allows the low-cost batch fabrication of structures with very high precision suitable for fiber alignment. The optical fiber switches consist of two thermally driven silicon actuators, a coupled U-shaped cantilever via thin flexible silicon beams and a stiff platform prevents angular displacement of the fibers. Switches have been fabricated with high yield, high mechanical stability, and good optical properties. Using standard single- mode fibers, the switches exhibit a crosstalk of < - 60 dB. Insertion losses below 1 dB and about 1 dB are achievable for 1 by 4 and 2 by 2 switches, respectively. A power below 0.6 W and 1.0 W for the 2 by 2 and 1 by 4 micromechanical fiber switch is needed during the switching time. Bistable 1 by 2 optical fiber switches have been tested for more than 1 X 10⁶ switching cycles without any failure and after more than one year at room conditions they do not show any degeneration of optical properties and switching behavior.

Citation Download Citation

Peter Kopka, Martin Hoffmann, and Edgar I. Voges "Latching-type 2x2 and 1x4 fiber-optic switches", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396488

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KEYWORDS

Switches

Silicon

Actuators

Switching

Semiconducting wafers

Silicon films

Optical fibers

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