Patternable hybrid sol-gel glass

HongJin Jiang; XiaoCong Yuan; Yuen Chuen Chan; Yee Loy Lam

doi:10.1117/12.404848

20 October 2000 Patternable hybrid sol-gel glass

HongJin Jiang, XiaoCong Yuan, Yuen Chuen Chan, Yee Loy Lam

Author Affiliations +

Proceedings Volume 4226, Microlithographic Techniques in Integrated Circuit Fabrication II; (2000) https://doi.org/10.1117/12.404848
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

The hybrid sol-gel materials have been extensively studied and widely used in the fabrication of optical devices due to their attractive properties. In this work, the synthesis of the UV sensitive organic- inorganic SiO₂/TiO₂ sol-gel glass is presented. The effect of the fabrication parameters such as doping concentration, bake temperature and UV light exposure time on the film characteristics (thickness and refractive index) are studied. A simple way of patterning the material by UV light radiation is also introduced. These demonstrate the material possesses high potential application for the micro-optics device fabrication.

Citation Download Citation

HongJin Jiang, XiaoCong Yuan, Yuen Chuen Chan, and Yee Loy Lam "Patternable hybrid sol-gel glass", Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); https://doi.org/10.1117/12.404848

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE