Pulsed laser deposition of titanium-based thin layers

Boguslaw Major; Reinhold Ebner; Grzegorz Kruzel; Waldemar Wolczynski

doi:10.1117/12.405971

2 November 2000 Pulsed laser deposition of titanium-based thin layers

Boguslaw Major, Reinhold Ebner, Grzegorz Kruzel, Waldemar Wolczynski

Proceedings Volume 4238, Laser Technology VI: Applications; (2000) https://doi.org/10.1117/12.405971
Event: Laser Technology VI, 1999, Szczecin, Poland

Abstract

Complex examinations of the structure were performed on thin layers of metallic titanium, titanium nitride and titanium oxide deposited by the means of PLD using Nd:YAG laser. Influence of deposition parameters on the film morphology was under examination. The layers revealed a nano-structure of a good quality. Appearance of a new tetragonal Ti(N)- phase was sated in the deposition of titanium metallic in the reactive chamber with argon atmosphere. The TiN-phase was formed during deposition of titanium nitride, independently of nitrogen flow in the chamber. Transition of oxides from the Ti₂-O via TiO to TiO₂ was observed with increasing flow of oxygen in the chamber for deposition of titanium oxide. TEM examinations of microstructure within the cross-sections of layer revealed a micro-collumnar structure. All of the examined layers were characterised by a strong axial crystallographic preferred orientation which has been stated on the basis of the measured pole figures. The 001 axial texture was identified within the deposited metallic titanium for the Ti(N) tetragonal phase as well as for the TiO oxide, while the 111 texture was observed in the case of TiN nitride. Measurements of the residual stresses of the I-st order in the TiN phase using the X-ray sin²(psi) method, showed the stress level of -5000 to - 7000 Mpa. The residual stresses measured in the substrate of ferritic steel wer about of -150MPa.

Citation Download Citation

Boguslaw Major, Reinhold Ebner, Grzegorz Kruzel, and Waldemar Wolczynski "Pulsed laser deposition of titanium-based thin layers", Proc. SPIE 4238, Laser Technology VI: Applications, (2 November 2000); https://doi.org/10.1117/12.405971

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available