3D finite element modeling of micromachined pressure sensor

Alexei I. Borovkov; Evgenij N. Pyatishev; Mihail S. Lurie; Y. D. Akulshin; E. V. Pereyaslavets

doi:10.1117/12.417671

1 February 2001 3D finite element modeling of micromachined pressure sensor

Alexei I. Borovkov, Evgenij N. Pyatishev, Mihail S. Lurie, Y. D. Akulshin, E. V. Pereyaslavets

Proceedings Volume 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2001) https://doi.org/10.1117/12.417671
Event: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 2000, St. Petersburg, Russian Federation

Abstract

The paper presents 3D finite element (FE) approach to modeling pressure microsensor. It consists of two basic parts. In the first part the 3D finite element modeling itself is presented. The second part of the work deals with the FE structural and modal analysis of different 3D FE models. These researches will allow improve characteristics of the given sensor with the purpose of its further practical application.

Citation Download Citation

Alexei I. Borovkov, Evgenij N. Pyatishev, Mihail S. Lurie, Y. D. Akulshin, and E. V. Pereyaslavets "3D finite element modeling of micromachined pressure sensor", Proc. SPIE 4348, Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (1 February 2001); https://doi.org/10.1117/12.417671

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