Application of digital holography for the inspection of microcomponents

Wolfgang Osten; Soenke Seebacher; Werner P. O. Jueptner

doi:10.1117/12.445589

23 October 2001 Application of digital holography for the inspection of microcomponents

Wolfgang Osten, Soenke Seebacher, Werner P. O. Jueptner

Proceedings Volume 4400, Microsystems Engineering: Metrology and Inspection; (2001) https://doi.org/10.1117/12.445589
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Digital Holography is a modern coherent-optical technique that allows the direct access to the interference phase in holographic interferometry. In contrast to conventional tactical measurement techniques digital holographic interferometry provides full-field access, non-invasivity, high sensitivity and accuracy, high resolution of data points and advanced system performance in order to meet requirements of the underlying numerical or analytical model. The measured interference phase contains the information about the shape of the object under test and/or its deformation after loading. These data can be used to investigate the materials' behavior of microcomponents. In combination with special loading techniques and physical models of the loading behavior of the investigated components some important material parameters such as the Young's modulus, the Poisson ratio and the thermal expansion coefficient of microcomponents can be measured. The paper describes the measuring technology and shows some examples of micro component testing.

Citation Download Citation

Wolfgang Osten, Soenke Seebacher, and Werner P. O. Jueptner "Application of digital holography for the inspection of microcomponents", Proc. SPIE 4400, Microsystems Engineering: Metrology and Inspection, (23 October 2001); https://doi.org/10.1117/12.445589

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