Infrastructure needs for RF MEMS production

Henne van Heeren

doi:10.1117/12.425308

30 April 2001 Infrastructure needs for RF MEMS production

Henne van Heeren

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425308
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

RF MEMS activities until now has been driven by universities. For production of these enabling components a new industry is needed. RF MEMS processing is very different and even incompatible with traditional IC processing for at least two reasons: (1) the metals used are unfamiliar and often forbidden in semiconductor processing, (2) making free standing structures needs a specialist knowledge of the properties and the processing of these metals. Even for experienced MEMS institutes/companies making these products is a challenge, and as a result, they can only fulfill the first demands of the customers: i.e. testing of the possibilities of this new technology and proving its feasibility. These first players are generalists, having a broad knowledge of MEMS processes and applications. However, upcoming demand from the market asks different capabilities. Most customers nowadays are not looking for a few `breadboard' samples based on the latest available processes. They need non-technical capabilities like: reproducibility, reliability, timely delivery, etc. Much work has to be done to fit the design demands into the foundries and bring the production processes to a level comparable to mature industries such as semiconductor or magnetic head industries.

Citation Download Citation

Henne van Heeren "Infrastructure needs for RF MEMS production", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425308

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available