Microscopic study of the structure of the SnO2 thin films obtained by the RGTO technique

Jerzy Uljanow; Krzysztof Waczynski; Adam Broja; Teresa Karczewska-Buczek

doi:10.1117/12.435943

8 August 2001 Microscopic study of the structure of the SnO₂ thin films obtained by the RGTO technique

Jerzy Uljanow, Krzysztof Waczynski, Adam Broja, Teresa Karczewska-Buczek

Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435943
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland

Abstract

The results on the use of technology of rheotaxial growth and thermal oxidation to p0repare sensory layer of stannic oxide are present in this study. Sensor properties of the SnO₂ layers greatly depend on a stage of tin layer rheotaxial growth. Observations of tin layer surface made after the process of rheotaxial growth and the SnO₂ surface on the oxidation stage performed by means of a scanning electron microscope permitted drawing of many substantial conclusions regarding technology of production. The worked out technology made it possible to form sensor structures, which were next measured. This study provides a fragment of a wide research project over preparation and characterization of thin sensory layers made from stannic oxide and accomplished at the Institute of Physics and Institute of Electronics, Silesian Technical University.

Citation Download Citation

Jerzy Uljanow, Krzysztof Waczynski, Adam Broja, and Teresa Karczewska-Buczek "Microscopic study of the structure of the SnO₂ thin films obtained by the RGTO technique", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435943

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