Micromachined variable optical attenuator (VOA)

J. Li; Xu Ming Zhang; Ai Qun Liu; Q.X Zhang; Ting Mei

doi:10.1117/12.445084

18 October 2001 Micromachined variable optical attenuator (VOA)

J. Li, Xu Ming Zhang, Ai Qun Liu, Q.X Zhang, Ting Mei

Proceedings Volume 4582, Optical Switching and Optical Interconnection; (2001) https://doi.org/10.1117/12.445084
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

Variable optical attenuator (VOA) is undergoing to be a mainstream component of wavelength division multiplex (WDM) networks to monitor and control the optical power of wavelength channels. In this paper, a free-space VOA fabricated by micro electromechanical systems (MEMS) technology to operate in the 1.55 micrometers wavelength region is described. It employs a micromirror driven by an electrostatic comb drive to cut partially into the light beam between two single mode fibers (SMFs), enabling the attenuation. The micromirror has a size of 30 micrometers X 30 micrometers and is coated with aluminum to increase the reflectance. The moving fingers of comb drive and the micromirror are supported by folded suspension beams over the substrate. By applying different voltage to the comb drive, the micromirror translates to different position to achieve an attenuation ranging from 0.4dB to 50dB, and even higher. The nonlinear relationship between the position of the micromirror and attenuation is analyzed. The distributions of the light beams at the micromirror and the output fiber end are investigated respectively. And the influence of the separations between the micromirror, the input and output fiber ends is also discussed to obtain different attenuation resolutions. At low attenuation stages, fine tuning of attenuation is obtainable. The largest attenuation is driven by 21voltage. Deep reactive ion etching (DRIE) process is employed to fabricate the VOA and the micro loading effect is remedied by mask design.

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J. Li, Xu Ming Zhang, Ai Qun Liu, Q.X Zhang, and Ting Mei "Micromachined variable optical attenuator (VOA)", Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); https://doi.org/10.1117/12.445084

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KEYWORDS

Micromirrors

Signal attenuation

Variable optical attenuators

Deep reactive ion etching

Single mode fibers

Control systems

Optical interconnects

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