Large-area deposition of a polycrystalline CdZnTe film and its applicability to x-ray panel detectors with superior sensitivity

Satoshi Tokuda; Hiroyoki Kishihara; Susumu Adachi; Toshiyuki Sato; Yoshihiro Izumi; Osamu Teranuma; Yasukuni Yamane; Satoshi Yamada

doi:10.1117/12.465579

3 May 2002 Large-area deposition of a polycrystalline CdZnTe film and its applicability to x-ray panel detectors with superior sensitivity

Satoshi Tokuda, Hiroyoki Kishihara, Susumu Adachi, Toshiyuki Sato, Yoshihiro Izumi, Osamu Teranuma, Yasukuni Yamane, Satoshi Yamada

Author Affiliations +

Proceedings Volume 4682, Medical Imaging 2002: Physics of Medical Imaging; (2002) https://doi.org/10.1117/12.465579
Event: Medical Imaging 2002, 2002, San Diego, California, United States

Abstract

This paper describes our investigation of the X-ray detective characteristics of a thick polycrystalline CdZnTe film deposited on a large-area substrate. We deposited a polycrystalline CdZnTe film on a 9 inch by 9 inch substrate, and investigated its quality. It was verified to be quite uniform within the substrate. We also cut the film and connected it to a 3 inch by 3 inch TFT panel for evaluating the X-ray imaging performance. The TFT array format was 512 by 512 pixels with a pixel pitch of 150 micrometers . The thickness of the CdZnTe film was about 300 micrometers after lapping and polishing, and the film density per unit area was higher than 170 mg/cm². The average sensitivity was 1.5E9 e-/mR/mm²; the beam condition was 80 kV with 26-mm Al filtration. The MTF measured at 1 lp/mm was 0.82. The time response and uniformity of X-ray sensitivity were not still adequate, and further improvements are in progress. In conclusion, we have demonstrated the applicability of the polycrystalline CdZnTe film to a large-area detector, although further investigations and improvements are needed.

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Satoshi Tokuda, Hiroyoki Kishihara, Susumu Adachi, Toshiyuki Sato, Yoshihiro Izumi, Osamu Teranuma, Yasukuni Yamane, and Satoshi Yamada "Large-area deposition of a polycrystalline CdZnTe film and its applicability to x-ray panel detectors with superior sensitivity", Proc. SPIE 4682, Medical Imaging 2002: Physics of Medical Imaging, (3 May 2002); https://doi.org/10.1117/12.465579

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