Elastic properties of cBN films by surface Brillouin scattering

Pavel Zinin; Murli H. Manghnani; Xinya Zhang; Horst Feldermann; Carsten Ronning; Hans Hofsaess

doi:10.1117/12.469899

11 June 2002 Elastic properties of cBN films by surface Brillouin scattering

Pavel Zinin, Murli H. Manghnani, Xinya Zhang, Horst Feldermann, Carsten Ronning, Hans Hofsaess

Proceedings Volume 4702, Smart Nondestructive Evaluation for Health Monitoring of Structural and Biological Systems; (2002) https://doi.org/10.1117/12.469899
Event: NDE For Health Monitoring and Diagnostics, 2002, San Diego, California, United States

Abstract

Surface Brillouin scattering (SBS) has been used to determine the elastic properties of thin hard submicron films cBN deposited on silicon. In case of cBN films, only the Rayleigh mode can be clearly identified in the Brillouin spectra. The elastic properties of the films have been determined by fitting experimental data to theoretical dispersion curves. A Green's function method was used to predict Brillouin scattering spectra of the acoustic excitation at the free surface. Our results demonstrate that the effect of thin hBN interlayer located between cBN film and Si substrate on the velocity of surface acoustic wave (SAW) does not exceed 2% for thin (16 nm film) and is negligible for cBN films thicker than 100 nm. The elastic properties of the cBN films are not softer than those of bulk cBN.

Citation Download Citation

Pavel Zinin, Murli H. Manghnani, Xinya Zhang, Horst Feldermann, Carsten Ronning, and Hans Hofsaess "Elastic properties of cBN films by surface Brillouin scattering", Proc. SPIE 4702, Smart Nondestructive Evaluation for Health Monitoring of Structural and Biological Systems, (11 June 2002); https://doi.org/10.1117/12.469899

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available