Analysis of microsprings for calculating the force produced by microactuators

Lijie Li; Deepak G. Uttamchandani

doi:10.1117/12.462836

19 April 2002 Analysis of microsprings for calculating the force produced by microactuators

Lijie Li, Deepak G. Uttamchandani

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462836
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

We present models of two types of microsprings namely box- spring and zig-zag spring that can be used to measure the force generated by microactuators. The spring constant for both springs is calculated by FEM using ANSYS software. In these models, the effects of short beams that act as connectors in the spring structures are considered and analyzed by changing their width. Also, from the results, we find that the box spring appears more balanced than the zig- zag spring when the force is applied in the single central direction. A series of SDAs with b ox spring have been fabricated and forces of those SDAs have been calculated.

Citation Download Citation

Lijie Li and Deepak G. Uttamchandani "Analysis of microsprings for calculating the force produced by microactuators", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462836

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