Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements

Kevin Speller; Howard Goldberg; Jeff Gannon; Eric M. Lawrence

doi:10.1117/12.468197

22 May 2002 Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements

Kevin Speller, Howard Goldberg, Jeff Gannon, Eric M. Lawrence

Proceedings Volume 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2002) https://doi.org/10.1117/12.468197
Event: Fifth International Conference on Vibration Measurements by Laser Techniques, 2002, Ancona, Italy

Abstract

Micro-Electro-Mechanical Systems (MEMS) devices present many difficult characterization challenges. In an environment where dimensions are measured in microns and mechanical resonant frequencies are measured in kilohertz, conventional measurement and characterization techniques cannot be used. Laser Doppler Vibrometer (LDV) technology offers many unique advantages for MEMS characterization and troubleshooting. One of the key problems in characterizing and troubleshooting MEMS devices is the separation of electrical and mechanical effects. By definition, MEMS devices have integrated electrical and mechanical components to form electro-mechanical systems. When characterizing and troubleshooting these devices it is often difficult to determine whether an observed behavior is purely mechanical, purely electrical, or inherently electro-mechanical. Because LDV measurements are electrically inert and do not introduce mechanical artifacts, they are ideally suited for this application. Applied MEMS and Polytec PT have successfully developed LDV based measurement techniques that allow detailed characterization and rapid troubleshooting of MEMS devices. Three real-world examples of MEMS characterization using a LDV are presented including, an optical micro-mirror, a robust low-noise accelerometer and a hermetic ceramic sensor package.

Citation Download Citation

Kevin Speller, Howard Goldberg, Jeff Gannon, and Eric M. Lawrence "Unique MEMS characterization solutions enabled by laser Doppler vibrometer measurements", Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); https://doi.org/10.1117/12.468197

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